F8987 Micro Flow Sensor
Technical parameters :
Model
F8987
Measuring Range①
20、30、50、100、200、500、1000、1200、2000sccm②
Min
Typical
Max
Unit
Full Scale Output
4.90
5.00
5.10
V
Zero Output
0.96
1.00
1.04
V
Output Impedance
-
200
-
Ω
Working Voltage
7.0
10.0
14.0
V
Working Current
15
25
30
mA
Accuracy
-
±1.5
±2.5
%F.S
Repeatability
-
±0.3
±0.5
%F.S
Annual Drift③
-
±0.1
±0.5
%F.S
Pressure range④
-
-
200
kPa
Response Time
5
10
15
ms
Working Temp.⑤
-25
-
65
℃
Storage Temp.
-40
-
90
℃
Note:
①The measuring range within 20-2000sccm is available and regular measuring ranges such as 20、30、50、100、200、500、1000、1200、2000sccm.Customized fee will be charged for other ranges.
②sccm means standard-state cubic centimeter per minute. Standard-state: gas temperature is 0℃ and pressure is 101.325 kPa.
③The testing environment is room temperature and clear air.
④The pressure range of 1 MPa can be customized.
⑤The temperature compensation is for the tem. range of 0-50℃ and the compensation performance can’t be ensured beyond the temperature range.