
F8987 Micro Flow Sensor
	 
	
Technical parameters :
	
	
		
			
				 
			
					Model
				 
				
					F8987
				 
			
				 
			
					Measuring Range①
				 
				
					20、30、50、100、200、500、1000、1200、2000sccm②
				 
			
				 
			
					 
				 
				
					Min
				 
				
					Typical
				 
				
					Max
				 
				
					Unit
				 
			
				 
			
					Full Scale Output
				 
				
					4.90
				 
				
					5.00
				 
				
					5.10
				 
				
					V
				 
			
				 
			
					Zero Output
				 
				
					0.96
				 
				
					1.00
				 
				
					1.04
				 
				
					V
				 
			
				 
			
					Output Impedance
				 
				
					-
				 
				
					200
				 
				
					-
				 
				
					Ω
				 
			
				 
			
					Working Voltage
				 
				
					7.0
				 
				
					10.0
				 
				
					14.0
				 
				
					V
				 
			
				 
			
					Working Current
				 
				
					15
				 
				
					25
				 
				
					30
				 
				
					mA
				 
			
				 
			
					Accuracy
				 
				
					-
				 
				
					±1.5
				 
				
					±2.5
				 
				
					%F.S
				 
			
				 
			
					Repeatability
				 
				
					-
				 
				
					±0.3
				 
				
					±0.5
				 
				
					%F.S
				 
			
				 
			
					Annual Drift③
				 
				
					-
				 
				
					±0.1
				 
				
					±0.5
				 
				
					%F.S
				 
			
				 
			
					Pressure range④
				 
				
					-
				 
				
					-
				 
				
					200
				 
				
					kPa
				 
			
				 
			
					Response Time
				 
				
					5
				 
				
					10
				 
				
					15
				 
				
					ms
				 
			
				 
			
					Working Temp.⑤
				 
				
					-25
				 
				
					-
				 
				
					65
				 
				
					℃
				 
			
				 
		
	
					Storage Temp.
				 
				
					-40
				 
				
					-
				 
				
					90
				 
				
					℃
				 
			

Note:
①The measuring range within 20-2000sccm is available and regular measuring ranges such as 20、30、50、100、200、500、1000、1200、2000sccm.Customized fee will be charged for other ranges.
②sccm means standard-state cubic centimeter per minute. Standard-state: gas temperature is 0℃ and pressure is 101.325 kPa.
③The testing environment is room temperature and clear air.
④The pressure range of 1 MPa can be customized.
⑤The temperature compensation is for the tem. range of 0-50℃ and the compensation performance can’t be ensured beyond the temperature range.